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kSA SpectraTemp黑体辐射光谱测温仪发布

发布者::admin   发布时间: :2015-10-10 15:51 浏览次数: :

 

NewkSA SpectraTemp

黑体辐射光谱测温仪最新发布

               ——New Tool for Absolute Temperature Measurement

黑体辐射光谱温仪是一款使用简便,非接触式的光学绝对温度测试系统和温度校准工具。采用k-Space独有的辐射光谱曲线分析专利技术,从而在无需校准和预先了解材料辐射率的情况下测定绝对温度。具有温度测试数据高精度、高重复性的特点。

应用:

l   MOCVD/MBE样品托温度检测

l   红外辐射高温计校准

l   半导体基片/wafer温度检测

l    绝对温度测量

k-Space Associates, Inc., leaders in thin film characterization products, announced today the worldwide release of its newest product, kSA SpectraTemp, a unique, self-calibrating absolute source temperature measurement tool.

k-Space CEO, Darryl Barlett, commented, “Absolute temperature is a very difficult parameter to measure.  With kSA SpectraTemp, if the source radiation is blackbody-like, an absolute temperature is instantly determined.”

kSA SpectraTemp is a non-contact, optically-based technique for measuring the temperature of semiconductor wafers, metals, ceramics, and much more.  It is based on patented technology that analyzes the spectral radiation profile utilizing a solid-state spectrometer, resulting in fast data acquisition and real-time temperature measurement. The user simply reads the temperature from the screen.

MOCVD and other thin-film deposition facilities can use it to measure absolute temperature on wafer carriers, providing more accurate and reliable temperatures and tool-to-tool matching.  As production facilities adopt this technology and gain better temperature control, device yield and quality will improve.


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